Inventor
KRUSE NATHAN J
US3 patents
Patents
3 patentsUS7055212B2Jun 6, 2006
Clean gas injector system for reactor chamber
TEXAS INSTRUMENTS INC3 citations49
US7423344B2Sep 9, 2008
Bi-layer etch stop process for defect reduction and via stress migration improvement
TEXAS INSTRUMENTS INC0 citations48
US7199047B2Apr 3, 2007
Bi-layer etch stop process for defect reduction and via stress migration improvement
TEXAS INSTRUMENTS INC0 citations48