Inventor
FISCHER AUGUST J
US3 patents
Patents
3 patentsUS6641867B1Nov 4, 2003
Methods for chemical vapor deposition of tungsten on silicon or dielectric
TEXAS INSTRUMENTS INC8 citations71
US7423344B2Sep 9, 2008
Bi-layer etch stop process for defect reduction and via stress migration improvement
TEXAS INSTRUMENTS INC0 citations48
US7199047B2Apr 3, 2007
Bi-layer etch stop process for defect reduction and via stress migration improvement
TEXAS INSTRUMENTS INC0 citations48