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Inventor
ASHITANI ATSUHIKO
JP
4 patents
⚠️ This page may combine multiple inventors who share the name “ASHITANI ATSUHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI INT ELECTRIC INC
3 patents
USD610559S
Feb 23, 2010
Reaction tube
HITACHI INT ELECTRIC INC
26 citations
91
US9508555B2
Nov 29, 2016
Method of manufacturing semiconductor device
HITACHI INT ELECTRIC INC
8 citations
82
US9972500B2
May 15, 2018
Method of manufacturing semiconductor device
HITACHI INT ELECTRIC INC
0 citations
50
KOKUSAI ELECTRIC CORP
1 patent
US12170206B2
Dec 17, 2024
Method of processing substrate, method of manufacturing semiconductor device, recording medium, and substrate processing apparatus
KOKUSAI ELECTRIC CORP
0 citations
57