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Inventor
KOMMISETTI SUBRAHMANYAM VENKATA RAMA
SG
2 patents
Patents
2 patents
US10140394B2
Nov 27, 2018
Method for rejecting tuning disturbances to improve lamp failure prediction quality in thermal processes
APPLIED MATERIALS INC
4 citations
66
US10896833B2
Jan 19, 2021
Methods and apparatus for detecting an endpoint of a seasoning process
APPLIED MATERIALS INC
3 citations
63