Inventor

LA TORRE FEDERICO

NL3 patents

Patents

3 patents

US10705438B2Jul 7, 2020

Lithographic method

ASML NETHERLANDS BV0 citations48

US10571814B2Feb 25, 2020

Lithographic method

ASML NETHERLANDS BV0 citations48

US11048178B2Jun 29, 2021

Lithographic apparatus with improved patterning performance

ASML NETHERLANDS BV0 citations46