Inventor

POULTNEY SHERMAN

US4 patents

⚠️ This page may combine multiple inventors who share the name “POULTNEY SHERMAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HUGHES AIRCRAFT CO

2 patents

US5282921AFeb 1, 1994

Apparatus and method for optimally scanning a two-dimensional surface of one or more objects

HUGHES AIRCRAFT CO22 citations88

US5312510AMay 17, 1994

Apparatus for optimally scanning a two-dimensional surface of one or more objects

HUGHES AIRCRAFT CO13 citations69

ASML HOLDING NV

2 patents

US7469058B2Dec 23, 2008

Method and system for a maskless lithography rasterization technique based on global optimization

ASML HOLDING NV8 citations67

US7113255B2Sep 26, 2006

Grating patch arrangement, lithographic apparatus, method of testing, device manufacturing method, and device manufactured thereby

ASML HOLDING NV2 citations60