Inventor
BLACKBURN REED A
US3 patents
Patents
3 patentsUS6854473B2Feb 15, 2005
Method and apparatus for executing plural processes on a microelectronic workpiece at a single processing station
SEMITOOL INC29 citations90
US6090711AJul 18, 2000
Methods for controlling semiconductor workpiece surface exposure to processing liquids
SEMITOOL INC29 citations88
US6602383B1Aug 5, 2003
Apparatus and methods for controlling workpiece surface exposure to processing liquids during the fabrication of microelectronic components
SEMITOOL INC3 citations58