Inventor

KELLY STEVEN E

US3 patents

⚠️ This page may combine multiple inventors who share the name “KELLY STEVEN E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SEMITOOL INC

2 patents

US6090711AJul 18, 2000

Methods for controlling semiconductor workpiece surface exposure to processing liquids

SEMITOOL INC29 citations88

US6602383B1Aug 5, 2003

Apparatus and methods for controlling workpiece surface exposure to processing liquids during the fabrication of microelectronic components

SEMITOOL INC3 citations58

HEWLETT PACKARD DEVELOPMENT CO

1 patent

US7691746B2Apr 6, 2010

Formation of silicon nitride layer on back side of substrate

HEWLETT PACKARD DEVELOPMENT CO1 citations48