Inventor
HIRAMOTO TATUMI
JP4 patents
⚠️ This page may combine multiple inventors who share the name “HIRAMOTO TATUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
USHIO ELECTRIC INC
3 patentsUS6984941B2Jan 10, 2006
Extreme UV radiation source and semiconductor exposure device
USHIO ELECTRIC INC12 citations74
US6965117B2Nov 15, 2005
Extreme UV light source and semiconductor exposure device
USHIO ELECTRIC INC4 citations57
US6858987B2Feb 22, 2005
Flash lamp unit and flash radiation device
USHIO ELECTRIC INC5 citations57