Inventor

RALEY ANGELIQUE DENISE

US2 patents

⚠️ This page may combine multiple inventors who share the name “RALEY ANGELIQUE DENISE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

1 patent

US8906760B2Dec 9, 2014

Aspect ratio dependent deposition to improve gate spacer profile, fin-loss and hardmask-loss for FinFET scheme

TOKYO ELECTRON LTD19 citations80

RALEY ANGELIQUE DENISE

1 patent

US8664125B2Mar 4, 2014

Highly selective spacer etch process with reduced sidewall spacer slimming

RALEY ANGELIQUE DENISE12 citations77