Inventor
GENBA JUN
JP7 patents
Patents
7 patentsUS10612160B2Apr 7, 2020
Epitaxial wafer and method for manufacturing same
SUMITOMO ELECTRIC INDUSTRIES2 citations71
US9957641B2May 1, 2018
Epitaxial wafer and method for manufacturing same
SUMITOMO ELECTRIC INDUSTRIES2 citations71
US9057147B2Jun 16, 2015
Silicon carbide epitaxial substrate and method of manufacturing silicon carbide epitaxial substrate
SUMITOMO ELECTRIC INDUSTRIES2 citations61
US9633840B2Apr 25, 2017
Method of manufacturing silicon carbide semiconductor substrate and method of manufacturing silicon carbide semiconductor device
SUMITOMO ELECTRIC INDUSTRIES0 citations47
US9368345B2Jun 14, 2016
Method of manufacturing silicon carbide semiconductor substrate and method of manufacturing silicon carbide semiconductor device
SUMITOMO ELECTRIC INDUSTRIES0 citations47
US9777404B2Oct 3, 2017
Method for manufacturing silicon carbide epitaxial substrate, and silicon carbide epitaxial substrate
SUMITOMO ELECTRIC INDUSTRIES0 citations40
US9269572B2Feb 23, 2016
Method for manufacturing silicon carbide semiconductor substrate
SUMITOMO ELECTRIC INDUSTRIES0 citations37