Inventor
JUN PIL-KWON
KR29 patents
⚠️ This page may combine multiple inventors who share the name “JUN PIL-KWON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
27 patentsUS6883248B2Apr 26, 2005
Apparatus for drying a substrate using an isopropyl alcohol vapor
SAMSUNG ELECTRONICS CO LTD26 citations90
US6458518B1Oct 1, 2002
Photoresist stripper composition and method for stripping photoresist using the same
SAMSUNG ELECTRONICS CO LTD15 citations89
US6432622B1Aug 13, 2002
Photoresist stripper composition and method for stripping photoresist using the same
SAMSUNG ELECTRONICS CO LTD21 citations89
US5866305AFeb 2, 1999
Thinner composition for washing a photoresist in a process for preparing semiconductors
SAMSUNG ELECTRONICS CO LTD28 citations88
US6100203AAug 8, 2000
Methods of employing aqueous cleaning compositions in manufacturing microelectronic devices
SAMSUNG ELECTRONICS CO LTD19 citations86
US7951653B1May 31, 2011
Methods of manufacturing a semiconductor device using compositions for etching copper
SAMSUNG ELECTRONICS CO LTD15 citations83
US6959823B2Nov 1, 2005
Wafer guides for processing semiconductor substrates
SAMSUNG ELECTRONICS CO LTD15 citations83
US7311857B2Dec 25, 2007
Etching composition, method of preparing the same, method of etching an oxide film, and method of manufacturing a semiconductor device
SAMSUNG ELECTRONICS CO LTD13 citations81
US6655042B2Dec 2, 2003
System and method for drying semiconductor substrate
SAMSUNG ELECTRONICS CO LTD12 citations72
US6207358B1Mar 27, 2001
Method of stripping a photoresist from a semiconductor substrate using dimethylacetamide or a combination of monoethanolamine and dimethylsulfoxide
SAMSUNG ELECTRONICS CO LTD8 citations72
US7183192B2Feb 27, 2007
Composition for removing photoresist and method of forming a bump electrode in a semiconductor device using the composition
SAMSUNG ELECTRONICS CO LTD7 citations71
US7811836B2Oct 12, 2010
Methods of manufacturing reference sample substrates for analyzing metal contamination levels
SAMSUNG ELECTRONICS CO LTD2 citations62
US7100306B2Sep 5, 2006
Wafer guides for processing semiconductor substrates
SAMSUNG ELECTRONICS CO LTD4 citations62
US6905570B2Jun 14, 2005
Apparatus for manufacturing integrated circuit device
SAMSUNG ELECTRONICS CO LTD5 citations62
US7037852B2May 2, 2006
Composition for stripping photoresist and method of preparing the same
SAMSUNG ELECTRONICS CO LTD2 citations61
US6713440B2Mar 30, 2004
Resist and etching by-product removing composition and resist removing method using the same
SAMSUNG ELECTRONICS CO LTD3 citations61
US6337174B1Jan 8, 2002
Method of stripping a photoresist from a semiconductor substrate dimethylacetamide or a combination of monoethanolamine and dimethylsulfoxide
SAMSUNG ELECTRONICS CO LTD4 citations61
US7985297B2Jul 26, 2011
Method of cleaning a quartz part
SAMSUNG ELECTRONICS CO LTD3 citations60
US7879736B2Feb 1, 2011
Composition for etching silicon oxide and method of forming a contact hole using the same
SAMSUNG ELECTRONICS CO LTD2 citations59
US7223721B2May 29, 2007
Resist and etching by-product removing composition and resist removing method using the same
SAMSUNG ELECTRONICS CO LTD1 citations51
US9528949B2Dec 27, 2016
Methods of detecting inhomogeneity of a layer and apparatus for performing the same
SAMSUNG ELECTRONICS CO LTD1 citations50
US7687448B2Mar 30, 2010
Composition for removing a photoresist, method of preparing the composition, method of removing a photoresist and method of manufacturing a semiconductor device using the composition
SAMSUNG ELECTRONICS CO LTD0 citations49
US7608540B2Oct 27, 2009
Composition for removing a photoresist, method of preparing the composition, method of removing a photoresist and method of manufacturing a semiconductor device using the composition
SAMSUNG ELECTRONICS CO LTD0 citations49
US7678751B2Mar 16, 2010
Composition for removing photoresist, method of removing photoresist and method of manufacturing a semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD1 citations48
US7208454B2Apr 24, 2007
Cleaning solution for removing anti-reflective coating composition
SAMSUNG ELECTRONICS CO LTD0 citations48
US6777379B2Aug 17, 2004
Cleaning solution and method of cleaning anti-reflective coating composition using the same
SAMSUNG ELECTRONICS CO LTD0 citations48
US9638609B2May 2, 2017
Apparatus for providing sample gas and related methods
SAMSUNG ELECTRONICS CO LTD0 citations37