Inventor

CHAE SEUNG-KI

KR28 patents

⚠️ This page may combine multiple inventors who share the name “CHAE SEUNG-KI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CHAE SEUNG-KI

SAMSUNG ELECTRONICS CO LTD

Semiconductor device manufacturing system having means for reducing a pressure difference between loadlock and processing chambers

Method of supplying slurry and a slurry supply apparatus having a mixing unit at a point of use

Semiconductor device manufacturing apparatus employing vacuum system

Semiconductor device manufacturing apparatus employing vacuum system

Method for processing a wafer and apparatus for performing the same

Methods of manufacturing a semiconductor device using compositions for etching copper

Laser cleaning of backside of wafer for photolithographic processing

Method of processing an object and method of controlling processing apparatus to prevent contamination of the object

Apparatus and method for analyzing contaminants on wafer

Apparatus and method for supplying chemicals in chemical mechanical polishing systems

Apparatus and method for depositing particles onto a wafer

Etching apparatus and etching method

Etching method

Method of cleaning a quartz part

Apparatus for depositing particles onto a wafer

Composition for etching silicon oxide and method of forming a contact hole using the same

Method and apparatus for exposing semiconductor substrates

Method and apparatus for reducing PFC emission during semiconductor manufacture

Method of exposing a wafer to a light, and reticle, reticle assembly and exposing apparatus for performing the same

Ion implanters having an arc chamber that affects ion current density

Composition for removing a photoresist, method of preparing the composition, method of removing a photoresist and method of manufacturing a semiconductor device using the composition

Composition for removing a photoresist, method of preparing the composition, method of removing a photoresist and method of manufacturing a semiconductor device using the composition

Ion implanting apparatus and ion implanting method using the same

Gas delivery system for supplying gas to semiconductor manufacturing equipment

Apparatus for decomposing perfluorinated compounds and system for processing perfluorinated compounds using the apparatus

PARK TEA-JIN

Vacuum pump having rotation body cleaning unit with spraying holes on an output surface of the cleaning body surrounding a shaft

KIM KOOK-JOO

Semiconductor devices and methods of manufacturing the same

FORHUMAN CO LTD

Apparatus for decomposing perfluorinated compounds and system for processing perfluorinated compounds using the apparatus