Inventor
NAN CHING-HSI
TW6 patents
Patents
6 patentsUS9639774B2May 2, 2017
Method for determining applicabilty of a processing device, a processing path and a processing pattern
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations68
US10783290B2Sep 22, 2020
IC manufacturing recipe similarity evaluation methods and systems
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations64
US12204313B2Jan 21, 2025
Method of making semiconductor devices and control system for performing the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US11119469B2Sep 14, 2021
Method of making semiconductor devices and a control system for performing the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US11481531B2Oct 25, 2022
IC manufacturing recipe similarity evaluation methods and systems
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations53
US10642255B2May 5, 2020
Component control in semiconductor performance processing with stable product offsets
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48