Inventor
FU YU-HSIU
TW4 patents
Patents
4 patentsUS9639774B2May 2, 2017
Method for determining applicabilty of a processing device, a processing path and a processing pattern
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations68
US12204313B2Jan 21, 2025
Method of making semiconductor devices and control system for performing the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US11119469B2Sep 14, 2021
Method of making semiconductor devices and a control system for performing the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US10642255B2May 5, 2020
Component control in semiconductor performance processing with stable product offsets
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48