Inventor
DE KUSTER JOHANNES PETERUS HENRICUS
NL3 patents
Patents
3 patentsUS7928412B2Apr 19, 2011
Lithographic apparatus, and device manufacturing method
ASML NETHERLANDS BV3 citations60
US7629594B2Dec 8, 2009
Lithographic apparatus, and device manufacturing method
ASML NETHERLANDS BV2 citations59
US10365558B2Jul 30, 2019
Apparatus and method for manufacturing a pellicle, and a pellicle
ASML NETHERLANDS BV1 citations52