Inventor

SIDELNIKOV YURII VICTOROVITCH

RU6 patents

⚠️ This page may combine multiple inventors who share the name “SIDELNIKOV YURII VICTOROVITCH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

4 patents

US7034308B2Apr 25, 2006

Radiation system, contamination barrier, lithographic apparatus, device manufacturing method and device manufactured thereby

ASML NETHERLANDS BV37 citations92

US8018574B2Sep 13, 2011

Lithographic apparatus, radiation system and device manufacturing method

ASML NETHERLANDS BV2 citations60

US7928412B2Apr 19, 2011

Lithographic apparatus, and device manufacturing method

ASML NETHERLANDS BV3 citations60

US7825390B2Nov 2, 2010

Apparatus with plasma radiation source and method of forming a beam of radiation and lithographic apparatus

ASML NETHERLANDS BV0 citations45

GLUSHKOV DENIS ALEXANDROVICH

1 patent

US9307624B2Apr 5, 2016

Lithographic apparatus

GLUSHKOV DENIS ALEXANDROVICH0 citations42

KRIVTSUN VLADIMIR MIHAILOVITCH

1 patent

US8294128B2Oct 23, 2012

Apparatus with plasma radiation source and method of forming a beam of radiation

KRIVTSUN VLADIMIR MIHAILOVITCH0 citations42