Inventor
VAN DER VELDEN MARC HUBERTUS LORENZ
NL3 patents
Patents
3 patentsUS7928412B2Apr 19, 2011
Lithographic apparatus, and device manufacturing method
ASML NETHERLANDS BV3 citations60
US7629594B2Dec 8, 2009
Lithographic apparatus, and device manufacturing method
ASML NETHERLANDS BV2 citations59
US7491951B2Feb 17, 2009
Lithographic apparatus, system and device manufacturing method
ASML NETHERLANDS BV2 citations59