P

Inventor

GIELISSEN KURT

BE7 patents
⚠️ This page may combine multiple inventors who share the name “GIELISSEN KURT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

3 patents
US7928412B2Apr 19, 2011

Lithographic apparatus, and device manufacturing method

ASML NETHERLANDS BV3 citations60
US7687788B2Mar 30, 2010

Debris prevention system, radiation system, and lithographic apparatus

ASML NETHERLANDS BV2 citations60
US7629594B2Dec 8, 2009

Lithographic apparatus, and device manufacturing method

ASML NETHERLANDS BV2 citations59

VAN HERPEN MAARTEN MARINUS JOHANNES WILHELMUS

1 patent
US8071963B2Dec 6, 2011

Debris mitigation system and lithographic apparatus

VAN HERPEN MAARTEN MARINUS JOHANNES WILHELMUS7 citations83

FRIJNS OLAV WALDEMAR VLADIMIR

1 patent
US8736806B2May 27, 2014

Lithographic apparatus, a radiation system, a device manufacturing method and a radiation generating method

FRIJNS OLAV WALDEMAR VLADIMIR4 citations69

SOER WOUTER ANTHON

1 patent
US8263950B2Sep 11, 2012

Radiation source

SOER WOUTER ANTHON2 citations61

GLUSHKOV DENIS ALEXANDROVICH

1 patent
US9307624B2Apr 5, 2016

Lithographic apparatus

GLUSHKOV DENIS ALEXANDROVICH0 citations42