Inventor
MISAWA NOBUHIRO
JP15 patents
⚠️ This page may combine multiple inventors who share the name “MISAWA NOBUHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FUJITSU LTD
5 patentsUS5470789ANov 28, 1995
Process for fabricating integrated circuit devices
FUJITSU LTD115 citations97
US6440844B1Aug 27, 2002
Semiconductor device with copper wiring and its manufacture method
FUJITSU LTD27 citations90
US7338905B2Mar 4, 2008
Semiconductor device manufacture method
FUJITSU LTD8 citations73
US5589425ADec 31, 1996
Process of selective area chemical vapor deposition of metal films
FUJITSU LTD15 citations73
US5264038ANov 23, 1993
Chemical vapor deposition system
FUJITSU LTD13 citations72