Inventor
OGINO KOZO
JP15 patents
⚠️ This page may combine multiple inventors who share the name “OGINO KOZO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FUJITSU SEMICONDUCTOR LTD
5 patentsUS8048600B2Nov 1, 2011
Parameter extracting method
FUJITSU SEMICONDUCTOR LTD2 citations61
US7861210B2Dec 28, 2010
Exposure data generator and method thereof
FUJITSU SEMICONDUCTOR LTD0 citations51
US7977018B2Jul 12, 2011
Exposure data preparation method and exposure method
FUJITSU SEMICONDUCTOR LTD1 citations46
US8022376B2Sep 20, 2011
Method for manufacturing semiconductor device or photomask
FUJITSU SEMICONDUCTOR LTD0 citations41
US7939246B2May 10, 2011
Charged particle beam projection method
FUJITSU SEMICONDUCTOR LTD0 citations40
FUJITSU LTD
4 patentsUS6677089B2Jan 13, 2004
Rectangle/lattice data conversion method for charged particle beam exposure mask pattern and charged particle beam exposure method
FUJITSU LTD68 citations94
US6544700B2Apr 8, 2003
Charged particle beam exposure method
FUJITSU LTD62 citations94
US7205078B2Apr 17, 2007
Method for generating backscattering intensity on the basis of lower layer structure in charged particle beam exposure, and method for fabricating semiconductor device utilizing this method
FUJITSU LTD19 citations82
US7240307B2Jul 3, 2007
Pattern size correcting device and pattern size correcting method
FUJITSU LTD5 citations61