Inventor
OH SUNG HYUN
KR7 patents
⚠️ This page may combine multiple inventors who share the name “OH SUNG HYUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HYNIX SEMICONDUCTOR INC
4 patentsUS8021805B2Sep 20, 2011
Backside phase grating mask and method for manufacturing the same
HYNIX SEMICONDUCTOR INC5 citations60
US7764368B2Jul 27, 2010
Method and apparatus for inspecting defects on mask
HYNIX SEMICONDUCTOR INC0 citations47
US7977016B2Jul 12, 2011
Method for fabricating extreme ultraviolet lithography mask
HYNIX SEMICONDUCTOR INC0 citations39
US7803505B2Sep 28, 2010
Method of fabricating a mask for a semiconductor device
HYNIX SEMICONDUCTOR INC0 citations37