Inventor
CHOI YONG KYOO
KR11 patents
⚠️ This page may combine multiple inventors who share the name “CHOI YONG KYOO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LG SEMICON CO LTD
5 patentsUS5770336AJun 23, 1998
Lithography mask and fabrication method thereof
LG SEMICON CO LTD27 citations91
US5824438AOct 20, 1998
Structure of phase shifting mask and method of manufacturing the same comprising an adhesive layer between a phase shift layer and a light blocking layer
LG SEMICON CO LTD8 citations73
US5650347AJul 22, 1997
Method of manufacturing a lightly doped drain MOS transistor
LG SEMICON CO LTD10 citations72
US6080514AJun 27, 2000
Fabrication method of mask for semiconductor device
LG SEMICON CO LTD2 citations61
US5891596AApr 6, 1999
Method for fabricating phase shifting mask
LG SEMICON CO LTD4 citations61
HYUNDAI ELECTRONICS IND
3 patentsUS6214498B1Apr 10, 2001
Lithography mask and a fabricating method thereof
HYUNDAI ELECTRONICS IND35 citations91
US6242164B1Jun 5, 2001
Method for patterning chemical amplified photoresist
HYUNDAI ELECTRONICS IND31 citations90
US6168907B1Jan 2, 2001
Method for etching semiconductor device
HYUNDAI ELECTRONICS IND7 citations71