Inventor
ENGESSER PHILIPP
DE13 patents
⚠️ This page may combine multiple inventors who share the name “ENGESSER PHILIPP”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES AG
8 patentsUS9597701B2Mar 21, 2017
Apparatus for treating surfaces of wafer-shaped articles
LAM RES AG2 citations72
US7988818B2Aug 2, 2011
Device for liquid treatment of wafer-shaped articles
LAM RES AG5 citations72
US9748120B2Aug 29, 2017
Apparatus for liquid treatment of disc-shaped articles and heating system for use in such apparatus
LAM RES AG6 citations65
US9870933B2Jan 16, 2018
Process and apparatus for treating surfaces of wafer-shaped articles
LAM RES AG4 citations64
US7799695B2Sep 21, 2010
Device for liquid treatment of wafer-shaped articles
LAM RES AG4 citations61
US8038804B2Oct 18, 2011
Method for drying a surface
LAM RES AG0 citations50
US9960057B2May 1, 2018
Device for measuring the distribution or impulse of a series of droplets
LAM RES AG0 citations47
US10249521B2Apr 2, 2019
Wet-dry integrated wafer processing system
LAM RES AG0 citations39
SEMSYSCO GMBH
3 patentsUS11908698B2Feb 20, 2024
Method and device for plating a recess in a substrate
SEMSYSCO GMBH0 citations58
US11164748B2Nov 2, 2021
Method and device for plating a recess in a substrate
SEMSYSCO GMBH1 citations58
US12351921B2Jul 8, 2025
Distribution body for a process fluid for chemical and/or electrolytic surface treatment of a substrate
SEMSYSCO GMBH0 citations50