Inventor
JURSICH GREGORY M
US12 patents
⚠️ This page may combine multiple inventors who share the name “JURSICH GREGORY M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AIR LIQUIDE AMERICAN
6 patentsUS5672827ASep 30, 1997
Method for measuring the flow rate of a species contained in an exhaust gas stream of a combustion process
AIR LIQUIDE AMERICAN72 citations95
US5897847AApr 27, 1999
Method for extending the gas lifetime of excimer lasers
AIR LIQUIDE AMERICAN29 citations92
US5063035ANov 5, 1991
Enhanced performance of alumina for the removal of low-level fluorine from gas streams
AIR LIQUIDE AMERICAN6 citations68
US7141500B2Nov 28, 2006
Methods for forming aluminum containing films utilizing amino aluminum precursors
AIR LIQUIDE AMERICAN4 citations61
US6361750B2Mar 26, 2002
Systems for purification of boron trichloride
AIR LIQUIDE AMERICAN2 citations60
US6238636B1May 29, 2001
Process and systems for purification of boron trichloride
AIR LIQUIDE AMERICAN4 citations60
AIR LIQUIDE
3 patentsUS7334708B2Feb 26, 2008
Integral blocks, chemical delivery systems and methods for delivering an ultrapure chemical
AIR LIQUIDE24 citations88
US6543493B2Apr 8, 2003
Optical monitoring processes and apparatus for combined liquid level sensing and quality control
AIR LIQUIDE13 citations76
US7906094B2Mar 15, 2011
Method for producing a high purity trisilane product from the pyrolysis of disilane
AIR LIQUIDE5 citations56