Inventor
CHO WON-SOO
KR2 patents
Patents
2 patentsUS6516238B1Feb 4, 2003
Semiconductor factory automation system and method for transporting semiconductor wafers
HYUNDAI ELECTRONICS IND17 citations78
US6728588B2Apr 27, 2004
Apparatus and method for automatically controlling semiconductor manufacturing process in semiconductor factory automation system
HYUNDAI ELECTRONICS IND12 citations65