Inventor

SHIMOMURA ICHIRO

JP3 patents

⚠️ This page may combine multiple inventors who share the name “SHIMOMURA ICHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ISOA INC

1 patent

US6864971B2Mar 8, 2005

System and method for performing optical inspection utilizing diffracted light

ISOA INC13 citations81

TOKYO ELECTRON LTD

1 patent

US7573054B2Aug 11, 2009

Edge exposure apparatus, coating and developing apparatus, and edge exposure method

TOKYO ELECTRON LTD7 citations68

FUJI XEROX CO LTD

1 patent

US7865130B2Jan 4, 2011

Material processing apparatus, material processing method, and material processing program product

FUJI XEROX CO LTD0 citations32