Inventor

BERG SOEREN

SE3 patents

⚠️ This page may combine multiple inventors who share the name “BERG SOEREN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SURFCOAT OY

1 patent

US5716500AFeb 10, 1998

Method and an apparatus for generation of a discharge in own vapors of a radio frequency electrode for sustained self-sputtering and evaporation of the electrode

SURFCOAT OY255 citations94

CARDINAL CG CO

1 patent

US7465378B2Dec 16, 2008

Method for reactive sputtering deposition

CARDINAL CG CO4 citations56

HARTIG KLAUS

1 patent

US8435388B2May 7, 2013

Reactive sputter deposition processes and equipment

HARTIG KLAUS1 citations47