Inventor
CARLSON CHARLES
US27 patents
⚠️ This page may combine multiple inventors who share the name “CARLSON CHARLES”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
15 patentsUS7925377B2Apr 12, 2011
Cluster tool architecture for processing a substrate
APPLIED MATERIALS INC45 citations97
US7743728B2Jun 29, 2010
Cluster tool architecture for processing a substrate
APPLIED MATERIALS INC36 citations96
US7694647B2Apr 13, 2010
Cluster tool architecture for processing a substrate
APPLIED MATERIALS INC42 citations96
US6146504ANov 14, 2000
Substrate support and lift apparatus and method
APPLIED MATERIALS INC88 citations96
US7651306B2Jan 26, 2010
Cartesian robot cluster tool architecture
APPLIED MATERIALS INC50 citations93
US7819079B2Oct 26, 2010
Cartesian cluster tool configuration for lithography type processes
APPLIED MATERIALS INC26 citations92
US7798764B2Sep 21, 2010
Substrate processing sequence in a cartesian robot cluster tool
APPLIED MATERIALS INC22 citations92
US7374393B2May 20, 2008
Method of retaining a substrate during a substrate transferring process
APPLIED MATERIALS INC17 citations92
US6315878B1Nov 13, 2001
Substrate support and lift apparatus and method
APPLIED MATERIALS INC38 citations91
US7694688B2Apr 13, 2010
Wet clean system design
APPLIED MATERIALS INC20 citations88
US7374391B2May 20, 2008
Substrate gripper for a substrate handling robot
APPLIED MATERIALS INC9 citations83
US10361104B2Jul 23, 2019
Ambient controlled transfer module and process system
APPLIED MATERIALS INC3 citations70
US12249522B2Mar 11, 2025
Processing chamber with annealing mini-environment
APPLIED MATERIALS INC0 citations60
US11791176B2Oct 17, 2023
Processing chamber with annealing mini-environment
APPLIED MATERIALS INC0 citations60
US10818525B2Oct 27, 2020
Ambient controlled transfer module and process system
APPLIED MATERIALS INC0 citations49
ISHIKAWA TETSUYA
4 patentsUS8550031B2Oct 8, 2013
Cluster tool architecture for processing a substrate
ISHIKAWA TETSUYA13 citations92
US8215262B2Jul 10, 2012
Cluster tool architecture for processing a substrate
ISHIKAWA TETSUYA15 citations92
US8181596B2May 22, 2012
Cluster tool architecture for processing a substrate
ISHIKAWA TETSUYA15 citations92
US8146530B2Apr 3, 2012
Cluster tool architecture for processing a substrate
ISHIKAWA TETSUYA22 citations92