Inventor
ENGLHARDT ERIC
US16 patents
⚠️ This page may combine multiple inventors who share the name “ENGLHARDT ERIC”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
10 patentsUS11527424B2Dec 13, 2022
Substrate transfer systems and methods of use thereof
APPLIED MATERIALS INC16 citations93
US7651306B2Jan 26, 2010
Cartesian robot cluster tool architecture
APPLIED MATERIALS INC50 citations93
US7798764B2Sep 21, 2010
Substrate processing sequence in a cartesian robot cluster tool
APPLIED MATERIALS INC22 citations92
US7720557B2May 18, 2010
Methods and apparatus for enhanced operation of substrate carrier handlers
APPLIED MATERIALS INC23 citations92
US7374393B2May 20, 2008
Method of retaining a substrate during a substrate transferring process
APPLIED MATERIALS INC17 citations92
US6155198ADec 5, 2000
Apparatus for constructing an oxidized film on a semiconductor wafer
APPLIED MATERIALS INC29 citations91
US7374391B2May 20, 2008
Substrate gripper for a substrate handling robot
APPLIED MATERIALS INC9 citations83
US6699530B2Mar 2, 2004
Method for constructing a film on a semiconductor wafer
APPLIED MATERIALS INC11 citations73
US11784074B2Oct 10, 2023
Substrate transfer systems and methods of use thereof
APPLIED MATERIALS INC2 citations72
US12334376B2Jun 17, 2025
Substrate transfer systems and methods of use thereof
APPLIED MATERIALS INC0 citations62
SHAH VINAY K
3 patentsUS8689812B2Apr 8, 2014
Methods and loadport for purging a substrate carrier
SHAH VINAY K18 citations92
US8601975B2Dec 10, 2013
Methods and loadport apparatus for purging a substrate carrier
SHAH VINAY K11 citations83
US8074597B2Dec 13, 2011
Methods and apparatus for purging a substrate carrier
SHAH VINAY K12 citations81