Inventor
HRUZEK DEAN C
US32 patents
⚠️ This page may combine multiple inventors who share the name “HRUZEK DEAN C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
29 patentsUS7651306B2Jan 26, 2010
Cartesian robot cluster tool architecture
APPLIED MATERIALS INC50 citations93
US10388547B2Aug 20, 2019
Side storage pods, equipment front end modules, and methods for processing substrates
APPLIED MATERIALS INC14 citations92
US7798764B2Sep 21, 2010
Substrate processing sequence in a cartesian robot cluster tool
APPLIED MATERIALS INC22 citations92
US7374393B2May 20, 2008
Method of retaining a substrate during a substrate transferring process
APPLIED MATERIALS INC17 citations92
US11244844B2Feb 8, 2022
High flow velocity, gas-purged, side storage pod apparatus, assemblies, and methods
APPLIED MATERIALS INC11 citations85
US10359743B2Jul 23, 2019
Substrate processing systems, apparatus, and methods with substrate carrier and purge chamber environmental controls
APPLIED MATERIALS INC10 citations84
US11189511B2Nov 30, 2021
Side storage pods, equipment front end modules, and methods for operating EFEMs
APPLIED MATERIALS INC7 citations83
US7374391B2May 20, 2008
Substrate gripper for a substrate handling robot
APPLIED MATERIALS INC9 citations83
US10847390B2Nov 24, 2020
Multi-blade robot apparatus, electronic device manufacturing apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing
APPLIED MATERIALS INC6 citations82
US10192765B2Jan 29, 2019
Substrate processing systems, apparatus, and methods with factory interface environmental controls
APPLIED MATERIALS INC13 citations81
US9147592B2Sep 29, 2015
Linked vacuum processing tools and methods of using the same
APPLIED MATERIALS INC13 citations80
US10159169B2Dec 18, 2018
Flexible equipment front end module interfaces, environmentally-controlled equipment front end modules, and assembly methods
APPLIED MATERIALS INC12 citations78
US11508593B2Nov 22, 2022
Side storage pods, electronic device processing systems, and methods for operating the same
APPLIED MATERIALS INC2 citations73
US10278501B2May 7, 2019
Load lock door assembly, load lock apparatus, electronic device processing systems, and methods
APPLIED MATERIALS INC2 citations73
US11353381B1Jun 7, 2022
Portable disc to measure chemical gas contaminants within semiconductor equipment and clean room
APPLIED MATERIALS INC3 citations70
US11791185B2Oct 17, 2023
Side storage pods, electronic device processing systems, and methods for operating the same
APPLIED MATERIALS INC1 citations62
US11782404B2Oct 10, 2023
Substrate processing systems, apparatus, and methods with substrate carrier and purge chamber environmental controls
APPLIED MATERIALS INC0 citations62
US11003149B2May 11, 2021
Substrate processing systems, apparatus, and methods with substrate carrier and purge chamber environmental controls
APPLIED MATERIALS INC0 citations62
US10758045B2Sep 1, 2020
Load lock door assemblies, load lock apparatus, electronic device processing systems, and methods
APPLIED MATERIALS INC1 citations62
US12142500B2Nov 12, 2024
Side storage pods, equipment front end modules, and methods for processing substrates
APPLIED MATERIALS INC0 citations61
US11640915B2May 2, 2023
Side storage pods, equipment front end modules, and methods for operating EFEMs
APPLIED MATERIALS INC0 citations61
US11621182B2Apr 4, 2023
Multi-blade robot apparatus, electronic device manufacturing apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing
APPLIED MATERIALS INC0 citations61
US11087998B2Aug 10, 2021
Transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methods
APPLIED MATERIALS INC0 citations61
US10971381B2Apr 6, 2021
Transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methods
APPLIED MATERIALS INC0 citations61
US11610794B2Mar 21, 2023
Side storage pods, equipment front end modules, and methods for operating the same
APPLIED MATERIALS INC0 citations60
US11450539B2Sep 20, 2022
Substrate processing systems, apparatus, and methods with factory interface environmental controls
APPLIED MATERIALS INC0 citations60
US11282724B2Mar 22, 2022
Substrate processing systems, apparatus, and methods with factory interface environmental controls
APPLIED MATERIALS INC0 citations59
US12523380B2Jan 13, 2026
Prevention of contamination of substrates during pressure changes in processing systems
APPLIED MATERIALS INC0 citations54
US11061417B2Jul 13, 2021
Selectable-rate bottom purge apparatus and methods
APPLIED MATERIALS INC0 citations40