Inventor
SILVETTI DAVE
US5 patents
⚠️ This page may combine multiple inventors who share the name “SILVETTI DAVE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
3 patentsUS6366346B1Apr 2, 2002
Method and apparatus for optical detection of effluent composition
APPLIED MATERIALS INC89 citations94
US7651306B2Jan 26, 2010
Cartesian robot cluster tool architecture
APPLIED MATERIALS INC50 citations93
US7798764B2Sep 21, 2010
Substrate processing sequence in a cartesian robot cluster tool
APPLIED MATERIALS INC22 citations92