Inventor
KUCHAR MICHAEL
US15 patents
⚠️ This page may combine multiple inventors who share the name “KUCHAR MICHAEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
12 patentsUS7651306B2Jan 26, 2010
Cartesian robot cluster tool architecture
APPLIED MATERIALS INC50 citations93
US7798764B2Sep 21, 2010
Substrate processing sequence in a cartesian robot cluster tool
APPLIED MATERIALS INC22 citations92
US7374393B2May 20, 2008
Method of retaining a substrate during a substrate transferring process
APPLIED MATERIALS INC17 citations92
US7374391B2May 20, 2008
Substrate gripper for a substrate handling robot
APPLIED MATERIALS INC9 citations83
US10159169B2Dec 18, 2018
Flexible equipment front end module interfaces, environmentally-controlled equipment front end modules, and assembly methods
APPLIED MATERIALS INC12 citations78
US11555250B2Jan 17, 2023
Organic contamination free surface machining
APPLIED MATERIALS INC2 citations67
US11328943B2May 10, 2022
Dual gate and single actuator system
APPLIED MATERIALS INC2 citations66
US11087998B2Aug 10, 2021
Transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methods
APPLIED MATERIALS INC0 citations61
US10971381B2Apr 6, 2021
Transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methods
APPLIED MATERIALS INC0 citations61
US11932950B2Mar 19, 2024
Organic contamination free surface machining
APPLIED MATERIALS INC0 citations56
US10381247B2Aug 13, 2019
Gas systems and methods for chamber ports
APPLIED MATERIALS INC0 citations47
US9435025B2Sep 6, 2016
Gas apparatus, systems, and methods for chamber ports
APPLIED MATERIALS INC1 citations47