Inventor

ROSA JASON DELLA

US2 patents

Patents

2 patents

US9909213B2Mar 6, 2018

Recursive pumping for symmetrical gas exhaust to control critical dimension uniformity in plasma reactors

APPLIED MATERIALS INC3 citations70

US10304715B2May 28, 2019

Electrostatic chuck having thermally isolated zones with minimal crosstalk

APPLIED MATERIALS INC0 citations50