Inventor
QUARATIELLO MARK J
US4 patents
Patents
4 patentsUS7000465B1Feb 21, 2006
Attitude error self-correction for thermal sensors of mass flow meters and controllers
MKS INSTR INC22 citations86
US10725484B2Jul 28, 2020
Method and apparatus for pulse gas delivery using an external pressure trigger
MKS INSTR INC5 citations82
US11513542B2Nov 29, 2022
Method and apparatus for pulse gas delivery using an external pressure trigger
MKS INSTR INC0 citations60
US11573583B2Feb 7, 2023
Pressure control using an external trigger
MKS INSTR INC0 citations59