Inventor
GROBER ROBERT DAVID
US2 patents
Patents
2 patentsUS6376149B2Apr 23, 2002
Methods and compositions for imaging acids in chemically amplified photoresists using pH-dependent fluorophores
UNIV YALE50 citations91
US6566030B2May 20, 2003
Methods and compositions for imaging acids in chemically amplified photoresists using pH-dependent fluorophores
UNIV YALE7 citations68