Inventor

RAYER II PHILLIP M

US3 patents

⚠️ This page may combine multiple inventors who share the name “RAYER II PHILLIP M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SPEEDFAM IPEC CORP

2 patents

US6802955B2Oct 12, 2004

Method and apparatus for the electrochemical deposition and planarization of a material on a workpiece surface

SPEEDFAM IPEC CORP43 citations91

US6406362B1Jun 18, 2002

Seal for use with a chemical mechanical planarization apparatus

SPEEDFAM IPEC CORP3 citations58

NOVELLUS SYSTEMS INC

1 patent

US7297239B2Nov 20, 2007

Method and apparatus for the electrochemical deposition and planarization of a material on a workpiece surface

NOVELLUS SYSTEMS INC11 citations82