Inventor

FALTER MANFRED

DE3 patents

⚠️ This page may combine multiple inventors who share the name “FALTER MANFRED”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MATTSON TECH INC

1 patent

US7977258B2Jul 12, 2011

Method and system for thermally processing a plurality of wafer-shaped objects

MATTSON TECH INC11 citations80

MATTSON THERMAL PRODUCTS GMBH

1 patent

US6965093B2Nov 15, 2005

Device for thermally treating substrates

MATTSON THERMAL PRODUCTS GMBH7 citations66

FALTER ERNST

1 patent

US8450652B2May 28, 2013

Apparatus for thermally treating semiconductor substrates

FALTER ERNST2 citations50