Inventor
TUOMINEN MARKO J
FI7 patents
⚠️ This page may combine multiple inventors who share the name “TUOMINEN MARKO J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM IP HOLDING BV
4 patentsUS10662533B2May 26, 2020
Thermal atomic layer etching processes
ASM IP HOLDING BV3 citations83
US11640899B2May 2, 2023
Atomic layer etching processes
ASM IP HOLDING BV1 citations72
US11230769B2Jan 25, 2022
Thermal atomic layer etching processes
ASM IP HOLDING BV1 citations72
US10665425B2May 26, 2020
Atomic layer etching processes
ASM IP HOLDING BV0 citations51