Inventor
WAKITA ASUKA
JP3 patents
Patents
3 patentsUS9984903B2May 29, 2018
Treatment cup cleaning method, substrate treatment method, and substrate treatment apparatus
SCREEN HOLDINGS CO LTD4 citations68
US9768042B2Sep 19, 2017
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD2 citations68
US12271830B2Apr 8, 2025
Learned model generating method, abnormality factor estimating device, substrate processing device, abnormality factor estimating method, learning method, learning device, and learning data generating method
SCREEN HOLDINGS CO LTD1 citations59