Inventor
BREUER JOHN
DE17 patents
⚠️ This page may combine multiple inventors who share the name “BREUER JOHN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH
14 patentsUS10176965B1Jan 8, 2019
Aberration-corrected multibeam source, charged particle beam device and method of imaging or illuminating a specimen with an array of primary charged particle beamlets
ICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH22 citations92
US11817292B2Nov 14, 2023
Primary charged particle beam current measurement
ICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH4 citations65
US12412727B2Sep 9, 2025
Charged particle beam system, corrector for aberration correction of a charged particle beam, and method thereof
ICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH0 citations62
US12386164B2Aug 12, 2025
Method of determining a brightness of a charged particle beam, method of determining a size of a source of the charged particle beam, and charged particle beam imaging device
ICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH0 citations58
US11810753B2Nov 7, 2023
Methods of determining aberrations of a charged particle beam, and charged particle beam system
ICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH0 citations58
US11791128B2Oct 17, 2023
Method of determining the beam convergence of a focused charged particle beam, and charged particle beam system
ICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH0 citations58
US12562338B2Feb 24, 2026
Method of determining an energy spectrum or energy width of a charged particle beam, and charged particle beam imaging device
ICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH0 citations57
US11545338B2Jan 3, 2023
Charged particle beam apparatus and method of controlling sample charge
ICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH1 citations56
US10991544B2Apr 27, 2021
Charged particle beam device, objective lens module, electrode device, and method of inspecting a specimen
ICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH0 citations56
US11257657B2Feb 22, 2022
Charged particle beam device with interferometer for height measurement
ICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH0 citations53
US12451322B2Oct 21, 2025
Method of forming a multipole device, method of influencing an electron beam, and multipole device
ICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH0 citations51
US10784072B2Sep 22, 2020
Aberration-corrected multibeam source, charged particle beam device and method of imaging or illuminating a specimen with an array of primary charged particle beamlets
ICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH0 citations50
US12308203B2May 20, 2025
Methods of determining aberrations of a charged particle beam, and charged particle beam system
ICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH0 citations47
US11501947B1Nov 15, 2022
Aberration corrector and method of aligning aberration corrector
ICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH0 citations46
ICT INTEGRATED CIRCUIT TESTING GES FÜR HALBLEITERPRÜFTECHNIK MBH
2 patentsUS9697983B1Jul 4, 2017
Thermal field emitter tip, electron beam device including a thermal field emitter tip and method for operating an electron beam device
ICT INTEGRATED CIRCUIT TESTING GES FÜR HALBLEITERPRÜFTECHNIK MBH7 citations80
US9472373B1Oct 18, 2016
Beam separator device, charged particle beam device and methods of operating thereof
ICT INTEGRATED CIRCUIT TESTING GES FÜR HALBLEITERPRÜFTECHNIK MBH7 citations80