Inventor
ANBE TAKAYUKI
JP3 patents
Patents
3 patentsUS5416426AMay 16, 1995
Method of measuring a voltage with an electron beam apparatus
FUJITSU LTD8 citations72
US5300880AApr 5, 1994
Method of measuring a voltage with an electron beam apparatus
FUJITSU LTD6 citations72
US5517028AMay 14, 1996
Electron beam apparatus for measuring a voltage of a sample
FUJITSU LTD8 citations66