Inventor
ANAND MINAKSHISUNDARAN BALASUB
JP11 patents
Patents
11 patentsUS6307265B1Oct 23, 2001
Feasible, gas-dielectric interconnect process
TOSHIBA KK49 citations96
US6291891B1Sep 18, 2001
Semiconductor device manufacturing method and semiconductor device
TOSHIBA KK69 citations96
US6362528B2Mar 26, 2002
Semiconductor device and method of manufacturing the same
TOSHIBA KK65 citations95
US6500748B2Dec 31, 2002
Semiconductor device and method of manufacturing the same
TOSHIBA KK38 citations92
US6368951B2Apr 9, 2002
Semiconductor device manufacturing method and semiconductor device
TOSHIBA KK16 citations92
US6253362B1Jun 26, 2001
Method of designing dummy wiring
TOSHIBA KK40 citations92
US5966634AOct 12, 1999
Method of manufacturing semiconductor device having multi-layer wiring structure with diffusion preventing film
TOSHIBA KK41 citations92
US5982040ANov 9, 1999
Semiconductor device and method for manufacturing the same
TOSHIBA KK11 citations74
US6720658B2Apr 13, 2004
Semiconductor device having a plurality of conductive layers
TOSHIBA KK12 citations73
US6037247AMar 14, 2000
Method of manufacturing semiconductor device having a self aligned contact
TOSHIBA KK15 citations73
US6306753B1Oct 23, 2001
Feasible, gas-dielectric interconnect process
TOSHIBA KK4 citations63