Inventor

ROBERTSON III ERIC ANTHONY

US2 patents

Patents

2 patents

US6159859ADec 12, 2000

Gas phase removal of SiO2 /metals from silicon

AIR PROD & CHEM22 citations86

US6534413B1Mar 18, 2003

Method to remove metal and silicon oxide during gas-phase sacrificial oxide etch

AIR PROD & CHEM18 citations80