Inventor

KUSBEL JIM

US3 patents

Patents

3 patents

US6696367B1Feb 24, 2004

System for the improved handling of wafers within a process tool

ASM INC452 citations96

US6883776B2Apr 26, 2005

Slit valve for a semiconductor processing system

ASM INC19 citations90

US7159846B2Jan 9, 2007

Slit valve for a semiconductor processing system

ASM INC10 citations81