Inventor
KUSABIRAKI DAISUKE
JP3 patents
Patents
3 patentsUS7608542B2Oct 27, 2009
Large-size glass substrate for photomask and making method, computer-readable recording medium, and mother glass exposure method
SHINETSU CHEMICAL CO4 citations60
US7183210B2Feb 27, 2007
Method for preparing large-size substrate
SHINETSU CHEMICAL CO6 citations60
US8012563B2Sep 6, 2011
Large-size substrate
SHINETSU CHEMICAL CO2 citations58