Inventor
SHUTO MITSUTOSHI
JP3 patents
Patents
3 patentsUS5192371AMar 9, 1993
Substrate supporting apparatus for a CVD apparatus
ASM JAPAN76 citations88
US8021723B2Sep 20, 2011
Method of plasma treatment using amplitude-modulated RF power
ASM JAPAN7 citations79
US7514934B2Apr 7, 2009
DC bias voltage measurement circuit and plasma CVD apparatus comprising the same
ASM JAPAN4 citations60