Inventor
SUN SAM X
US4 patents
⚠️ This page may combine multiple inventors who share the name “SUN SAM X”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SUN SAM X
3 patentsUS8415083B2Apr 9, 2013
On-track process for patterning hardmask by multiple dark field exposures
SUN SAM X6 citations81
US8133659B2Mar 13, 2012
On-track process for patterning hardmask by multiple dark field exposures
SUN SAM X3 citations60
US8168372B2May 1, 2012
Method of creating photolithographic structures with developer-trimmed hard mask
SUN SAM X2 citations56