Inventor

WAGEMANN ULRICH

DE3 patents

⚠️ This page may combine multiple inventors who share the name “WAGEMANN ULRICH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL SMT AG

2 patents

US7643149B2Jan 5, 2010

Method of aligning an optical system

ZEISS CARL SMT AG16 citations80

US7508488B2Mar 24, 2009

Projection exposure system and method of manufacturing a miniaturized device

ZEISS CARL SMT AG5 citations59

ZEISS CARL NTS LLC

1 patent

US8384029B2Feb 26, 2013

Cross-section systems and methods

ZEISS CARL NTS LLC0 citations46