Inventor
HUTCHINSON MARTIN A
GB15 patents
⚠️ This page may combine multiple inventors who share the name “HUTCHINSON MARTIN A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VARIAN ASSOCIATES
13 patentsUS4311427AJan 19, 1982
Wafer transfer system
VARIAN ASSOCIATES165 citations98
US4851101AJul 25, 1989
Sputter module for modular wafer processing machine
VARIAN ASSOCIATES124 citations96
US4715764ADec 29, 1987
Gate valve for wafer processing system
VARIAN ASSOCIATES92 citations96
US5281320AJan 25, 1994
Wafer coating system
VARIAN ASSOCIATES46 citations95
US4680061AJul 14, 1987
Method of thermal treatment of a wafer in an evacuated environment
VARIAN ASSOCIATES118 citations95
US4756815AJul 12, 1988
Wafer coating system
VARIAN ASSOCIATES46 citations92
US4647266AMar 3, 1987
Wafer coating system
VARIAN ASSOCIATES29 citations92
US4569746AFeb 11, 1986
Magnetron sputter device using the same pole piece for coupling separate confining magnetic fields to separate targets subject to separate discharges
VARIAN ASSOCIATES38 citations92
US5605866AFeb 25, 1997
Clamp with wafer release for semiconductor wafer processing equipment
VARIAN ASSOCIATES30 citations91
US4548699AOct 22, 1985
Transfer plate rotation system
VARIAN ASSOCIATES53 citations91
US5024747AJun 18, 1991
Wafer coating system
VARIAN ASSOCIATES27 citations89
US4436602AMar 13, 1984
Blocking shield and method for contouring the thickness of sputter coated layers
VARIAN ASSOCIATES23 citations81
US4416759ANov 22, 1983
Sputter system incorporating an improved blocking shield for contouring the thickness of sputter coated layers
VARIAN ASSOCIATES27 citations81